GP200 Series
Pressure-based Mass Flow Controllers

 

All of the performance.

None of the limitations.

WHITE PAPER

A New Differential Pressure Sensor Based MFC for Advanced Semiconductor Processing

 

Learn how use of a differential pressure sensor instead of discrete pressure sensors combined with locating the control valve downstream of the laminar flow element in the new GP200 Series P-MFC delivers obvious advantages in flow measurement accuracy and repeatability over traditional P-MFCs.

 

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Review GP200 Series technical specifications

 

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