How Does GP200 Series Work?

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Reduced Measurement Uncertainty

Integrated ΔP Sensor Assembly

Suitable

for All

Process Conditions

Laminar Flow Element

Precise & Repeatable

Gas Delivery

Downstream Valve Architecture

100X Improvement

in

Valve Leak-by

Engineered PCTFE Sealing Surface

WHITE PAPER

A New Differential Pressure Sensor Based MFC for Advanced Semiconductor Processing

Learn how use of a differential pressure sensor instead of discrete pressure sensors combined with locating the control valve downstream of the laminar flow element in the new GP200 Series P-MFC delivers obvious advantages in flow measurement accuracy and repeatability over traditional P-MFCs.

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What makes GP200 Series unique vs conventional P-MFCs?

See how the unique design approach of GP200 Series extends the use of P-MFCs to CVD processes.

Get the Data Sheet

Review GP200 Series technical specifications