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Reduced Measurement Uncertainty
Integrated ΔP Sensor Assembly
Suitable
for All
Process Conditions
Laminar Flow Element
Precise & Repeatable
Gas Delivery
Downstream Valve Architecture
100X Improvement
in
Valve Leak-by
Engineered PCTFE Sealing Surface
WHITE PAPER
A New Differential Pressure Sensor Based MFC for Advanced Semiconductor Processing
Learn how use of a differential pressure sensor instead of discrete pressure sensors combined with locating the control valve downstream of the laminar flow element in the new GP200 Series P-MFC delivers obvious advantages in flow measurement accuracy and repeatability over traditional P-MFCs.
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What makes GP200 Series unique vs conventional P-MFCs?
See how the unique design approach of GP200 Series extends the use of P-MFCs to CVD processes.
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Review GP200 Series technical specifications
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