XacTorr® Series Capacitance Manometers

Minimize drift and thermal effects. Maximize vacuum process results.

Models CMX0 / CMX1 / CMX2 / CMX3

Maximize the efficiency and performance of your vacuum-dependent processes: Choose XacTorr^® Series digital vacuum capacitance manometers from Brooks Instrument. XacTorr^® Series devices incorporate industry-leading features that improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects.

The advanced Mark-IV sensor contains surface areas not used in pressure measurement – providing locations for particles and condensable vapors to accumulate. This reduces the need to re-zero the gauge and increases sensor life without risking sensor drift. Additionally, an optional fast response sensor is available for superior closed loop control performance.

The result: ultra-accurate, repeatable and efficient vacuum measurement that ensures each time you evacuate a chamber, it reaches the precise Torr your process requires for clean, contaminant-free production.

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XacTorr® Series Data Sheet

Features

Available for process ranges from 0.10 Torr to 1000 Torr
Multiple accuracy levels available
Patented Mark IV sensor
Digital architecture enables operation over a wide dynamic range with extremely good accuracy
Dual-zone temperature control improves measurement stability and repeatability
Multi-decade digital calibration provides superior window of known accuracy
Intelli-touch zero adjustment
Independent & easily accessible diagnostic service port
DeviceNet® and analog communication options

Benefits

Lower drift, superior protection from deposition of process gases
Elimination of manual potentiometers and drift associated with electronics
Fast warm-up, close temperature control, rapid response to changes
Multi-decade calibration provides superior window of known accuracy, real-time compensation of ambient temperature effects
Cannot be zeroed if pressure is too high or desired temperature not reached
Diagnostic port allows monitoring and data acquisition simultaneously with device operation for chamber and tool matching along with “real time” advanced troubleshooting

Applications

Semiconductor fabrication
Thin-film deposition processes – glass, web and optical coatings
Freeze drying perishable materials
High-tech coatings for medical instruments (surgical instruments, dental drills, etc.)

Product Type

Capacitance Manometer

Differentiator

Heated or Unheated

Analog or Digital

Performance

Temperature

CMX0 Ambient

CMX1 45°C

CMX2 100°C

CMX3 160°C

Pressure Range

0.1, 1, 2, 10, 20, 100, 1000 Torr

mBar & Pascal References Available

Accuracy

CMX0: 0.25% of Reading

CMX1, CMX2: 1 to 1000 Torr Ranges = 0.15% of Reading

CMX1, CMX2: < 1 Torr Ranges = 0.25% of Reading

Measurement Range

4 Decades

Temperature Effect

On Zero

0.002% FS / °C

On Span

0.02% FS / °C

Mechanical

Exposed Materials

Inconel® and/or AISI 316L Stainless Steel

Over Pressure Limit

17 psia or 125% of Full Scale, whichever is greater

Size

Large

Electrical

Analog Communication

0-10 Vdc 5k Ohm load

Digital Communication

DeviceNet™

RS485

Electrical Connection

Analog/RS485 via 9-Pin or 15-Pin "D" connector

DeviceNet™ via 5-Pin "M12" connector

Various cable adaptors available. See product data sheet for more information.

Power Supply / Consumption

CMX0 power required is 200 mA @ ±15 Vdc

Power Input at Initial Warm-up Analog Models, Typical Values¹: CMX1 - 270 mA@±15 Vdc (±5%); CMX2 - 620 mA @ ± 15 Vdc (±5%)

Power Input at Steady State Analog Models, Typical Values¹:CMX1 - 175 mA @ ±15 Vdc (±5%); CMX2 - 350 mA @ ± 15 Vdc (±5%)

Power Input at Initial Warm-up DeviceNet Models, Typical Values: CMX1 - 400 mA @ 24 Vdc; CMX2 - 900 mA @ 24 Vdc

Power Input at Steady State DeviceNet Models, Typical Values: CMX1 - 300 mA @ 24 Vdc CMX2 - 600 mA @ 24 Vdc

1. 15-Pin Male Sub D Model requires an additional 40 mA to power the internal relays (if energized).

Certifications/Approvals

EMC

Fully CE Certified to EMC Directive 89/336/EEC

	CMX0	CMX1	CMX2	CMX3
Temperature	Ambient	45^oC	100^oC	160^oC
Pressure Range	1, 2, 10, 20, 100, 1000 Torr	0.1, 1, 2, 10, 20, 100, 1000 Torr	0.1, 1, 2, 10, 20, 100, 1000 Torr	1, 2, 10, 20, 100, 1000 Torr
Accuracy	0.25% of Reading	0.15% of Reading 1 - 1000 Torr Ranges 0.25% of Reading <1 Torr Ranges	0.15% of Reading 1 - 1000 Torr Ranges 0.25% of Reading <1 Torr Ranges	0.50% of Reading 1000 Torr Ranges 0.25% of Reading 10 - 100 Torr Ranges 0.35% of Reading 1 - 2 Torr Ranges
Analog Communication	0 - 10 Vdc RS485	0 - 10 Vdc RS485	0 - 10 Vdc RS485	0 - 10 Vdc RS485
Digital Communication	RS485 DeviceNet	RS485 DeviceNet	RS485 DeviceNet	RS485 DeviceNet

Filename	File Type	Documents By Language
Data Sheet	pdf	English
Installation & Operation Manual	pdf	English
DeviceNet™ Supplemental Manual - XacTorr® Series	pdf	English

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: CMX - 0 - XXX - 2 - 2

Capacitance Manometer

Temperature

Flow Range

Electrical Connector

Fitting

CMX

0 - CMX0 (Ambient)

1 - CMX45 (45°C)

2 - CMX100 (100°C)

XXX - Full Scale Range

See data sheet for complete listing.

2 - 15 Pin Male Sub D

See data sheet for complete listing.

2 - KF 16 Flange

3 - KF 25 Flange

4 - 8 VCR (1/2") Female

5 - Mini CF

See data sheet for complete listing.

Filename	File Type
CMX-0-XXX-1-4	STEP
CMX-0-XXX-2-2	DXF
CMX-0-XXX-2-2	IGS
CMX-0-XXX-2-2	STEP
CMX-0-XXX-2-3	IGS
CMX-0-XXX-2-3	DXF
CMX-0-XXX-2-3	STEP
CMX-0-XXX-2-4	DXF
CMX-0-XXX-2-4	IGS
CMX-0-XXX-2-4	STEP
CMX-0-XXX-2-5	DXF
CMX-0-XXX-2-5	IGS
CMX-0-XXX-2-5	STEP
CMX-0-XXX-2-N	IGS
CMX-0-XXX-2-N	STEP
CMX-1-XXX-1-4	IGS
CMX-1-XXX-1-4	STEP
CMX-1-XXX-L-N	DXF
CMX-1-XXX-L-N	STEP
CMX-1-XXX-P-N	STEP
CMX-2-XXX-1-N	IGS
CMX-2-XXX-1-N	STEP
CMX-3-XXX-4-0	DXF
CMX-3-XXX-4-0	IGS
CMX-3-XXX-4-0	STEP
CMX-3-XXX-D-4	DXF
CMX-3-XXX-D-4	IGS
CMX-3-XXX-D-4	STEP

XacTorr® GUI

An independent means of communicating with the capacitance manometer without interrupting tool communications.

XacTorr® Series Capacitance Manometers

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Features

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Applications

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