Learn From
Brooks Instrument
Flow Experts
The flow experts at Brooks Instrument are committed to providing you with training experiences that build your knowledge of our instruments so the processes that utilize them operate at the highest levels.
Each of the courses listed below can be delivered in-person or virtually.

TRN-MFC: Mass Flow Controller (MFC) Fundamentals
This comprehensive hands-on course is designed for metrology, maintenance, and instrumentation engineers responsible for the setup, configuration, calibration, and servicing of Brooks Instrument mass flow controllers (MFCs). It is also recommended for those that would benefit from deepening their knowledge of how to control, diagnose and troubleshoot their equipment and process. Courses are offered for both semiconductor and industrial MFCs.
OVERVIEW
- MFC Theory of Operations
- MFC Components and Flow Theory
- Valve Terminology and Control Fundamentals
- Sensor and Electronics Overview
- Software Tools
- Intro to Calibration
- Maintenance and Diagnostics

Approximately 3 hours. Four students included.
Registered students receive certificate of completion. Additional student adder available at $175 (175 Euro) per student.
Max 12 students per class. Available in English, German or Dutch.
For a Limited Time
25% Off Virtual Training: $670
15% Off In-person Training: $760
$895 List (895 Euro)
TRN-BEST: MFC Calibration Using BEST Pro Software
This in-depth course is designed to provide metrology, maintenance and instrumentation engineers with hands-on experience of how to calibrate Brooks Instrument mass flow controllers (MFCs) using our BEST Pro software. Other setup, configuration, tuning and troubleshooting functions will also be reviewed.
Prerequisites: TRN-MFC AND TRN-TRB OR an understanding of MFC theory, operation, and Brooks MFCs AND an understanding of BEST software and troubleshooting techniques.
TOPICS-SESSION 1
- BEST Software Overview
- Dump/Backup Files
- Model Codes
- As-Found/As-Left and Reports
- Full Calibration Overview
- Surrogate Page Creation
- Customer Page Creation and Validation
TOPICS-SESSION 2
- Calibrations for Different Gases
- Actual Gas versus Surrogate Gas Calibrations
- Reconfiguration of Device and System Audits
- Factors, Corrections and Flow Limitations
- Valve Tuning and PID
- I/O Calibration and Verification
- Diagnostics
Two separate sessions, approximately 2 hours each session.
Two students included. Registered students receive certificate of completion.
Additional student adder available at $175 (175 Euro) per student. Max 4 students per class. Available in English, German or Dutch.
$2,750 List (2,750 Euro)
TRN-TRB: Advanced Troubleshooting Using Brooks Diagnostic Software (BEST)
This course is designed to provide manufacturing technicians, metrology and instrumentation engineers with skills to identify possible causes of issues in the gas management system and provide the knowledge on how to utilize Brooks BEST software to troubleshoot/solve these issues. This training will also include a BEST software overview and simulated troubleshooting exercises.
Prerequisites: TRN-MFC OR an understanding of MFC theory, operation, and Brooks MFCs.
OVERVIEW
- Start-Up Best Practices
- Setting and Interpreting Flow Alarms
- Valve Performance and Tuning
- Accuracy Validation
- Comprehensive Overview of BEST Software and Features
Approximately 4 hours. Two students included.
Registered students receive certificate of completion. Additional student adder available at $175 (175 Euro) per student.
Max 6 students per class. Available in English, German or Dutch.