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SolidSense II® Pressure Transducers

Maximize process precision with accurate, stable, ultra-high purity control.
Models GF / GI / GR

For measuring pressure in ultra-high purity and specialty gas applications across many industries, pressure transmitters and transducers must maintain stability and accuracy. That's why Brooks Instrument SolidSense II® high pressure transducers combine weld-free, corrosion-resistant materials along with a design that delivers outstanding zero stability and accuracy within 0.25% of full scale.

We avoid the problems of zero and span drift, thermal shift and case stress that lead to maintenance and downtime issues with competitive high pressure transducers. Instead, SolidSense II® instruments deliver a robust, easy-to-maintain design that lowers the total cost of ownership.

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SolidSense II® Series Data Sheet

Features

  • Materials: Pressure transmitter features annealed VIM-VAR 316L stainless steel body with one-piece, machined sensor.
  • No welds or joints with dissimilar materials
  • Pressure Range: Up to 5,000 psi full scale
  • Models available with integrated display or full-function programmable display
  • Optional two user-configurable switches/relays with indicators
  • Digital thermal compensation uses multi-point temperature-compensation method
  • Proprietary micro-machined silicon strain gauges exhibit very low zero drift
  • Fully swept flow path completely removes residual gas

Benefits

  • Smooth surface finish and corrosion-resistant materials ensure contamination-free measurement – ideal for many semiconductor and industrial applications
  • Resistant to H2 embrittlement for longer life
  • Long-term, repeatable sensor performance under variable temperatures ensures reliable performance
  • Superior stability maintains accuracy
  • No initial zero adjustment reduces time spent on calibration
  • Two pairs of precision-matched strain gauge sensors ensure performance
  • Sensor attachment using glass fusion bonding relieves stress for longer life
  • Digital temperature compensation improves thermal stability over entire range of temperature

Applications

  • Semiconductor manufacturing including system interlock and automation
  • Ultra-high purity fluid storage and delivery systems
  • Thin-film processes
  • Chemical and petrochemical research
  • Laboratory and analytical projects
  • Food & beverage
  • Pharmaceuticals
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Product Type

Pressure Transducers

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Differentiator
Ultra-High Purity
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Performance
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Pressure Range
Up to 5,000 psi
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Burst Pressure
400% full scale
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Proof Pressure
200% full scale up to 2,000 psi, 150% full scale for higher ranges
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Accuracy
±0.25% Full Scale (BFSL)
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Response Time
< 5 msec
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Flow Temperature Coefficient

>100 PSI Ranges:  Full Scale:+0.02% full scale/°F (-4°F to 140°F, -20°C to 60°C) +0.50% full scale (68°F to 140°F, 20°C to 60°C) 0 to 10 Vdc version

<100 PSI Ranges:  Full Scale:+0.04% full scale/°F (-4°F to 140°F, -20°C to 60°C) +1.00% full scale (68°F to 140°F, 20°C to 60°C) 0 to 10 Vdc version

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Mechanical
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Materials of Construction
Housing: Stainless steel, polymer plastics
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Surface Finish
Compliant with SEMI F19
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Wetted Materials
VIM-VAR 316L stainless steel, SEMI F20
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Cleanliness
Compliant to ASTM F1374-92 (2005)
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Internal Volume
1.79cc
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Process Connections
Multiple configurations including tube, NPT, Face Seal and Surface Seal
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Ratings
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Temperature - Compensating
-4°F to 140°F (-20°C to 60°C) / 68°F to 140°F (20°C to 60°C) 0-10 Vdc version
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Temperature Range

Non-display version: -20°F to 180°F (-29°C to 82°C)

Integrated Display Version:-20°F to 140°F (-29°C to 60°C)

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Temperature - Storage

Non-display: -40°F to 180°F (-40°C to 82°C)

 Integrated display: -40°F to 167°F (-40°C to 75°C)

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Electrical
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Analog Communication
0-5 Vdc, 0-10 Vdc, 0.2-5.2 Vdc, 2-10 Vdc, 4-20 mA



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Supply Current

Non-display Version: Max. 10 mA

Integrated Display: Max. 30 mA

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Power Requirements

Display Version:10 to 30 Vdc for 4 to 20 mA output     Integrated Display Version:15 to 30 Vdc for 4 to 20 mA output and no signal output

Display Version:11 to 30 Vdc for 0 to 5 Vdc output      Integrated Display Version:11 to 30 Vdc for 0 to 5 Vdc output

Display Version: 13 to 32 Vdc for 0 to 10 Vdc output   Integrated Display Version:13 to 30 Vdc for 0 to 10 Vdc output

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Compliance
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Certifications/Approvals

EMC: Compliant to EU Directive 2004/108/EC

FM Approved: Non-Incendive for use in Class I, Div II Groups A, B, C and D Hazardous Applications

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Environmental Compliance

RoHS Directive (2011/65/EU)

REACH Directive EC 1907/2006

GF / GI GR
Differentiator

High Purity, Ultra-High Purity

Integrated Display

Programmable Switches

Rotatable Integrated Display

Configuration Single-Ended Dead End or Flow Through
Pressure Range Up to 3,000 psi Up to 5,000 psi
Accuracy ±0.25% Full Scale (BFSL) ±0.25% Full Scale
Output Type Analog Voltage or Current Analog Voltage or Current
Certifications/Approvals

RoHS: Compliant to 2002/95/EC

EMC: EMC Directive 2004/108/EC

Available with ATEX

RoHS: Compliant to 2011/65/EU

RoHS: Compliant to 2015/863/EC

REACH: Compliant to 1907/2006/EC

EMC: EMC Directive 2014/30/EU

Filename File Type Documents By Language
Data Sheet - GF Series pdf English
Data Sheet - GF ATEX Series pdf English
Data Sheet - GR Series pdf English
Installation Manual - GF Series pdf English
Installation Manual - GR Series pdf English

Use the following guide (model code information from data sheet) to translate the CAD configurations available below. If you need assistance or can’t find what you’re looking for, please contact Applications Engineering or your local Brooks Instrument representative.

Example: GF - D - B - CS

Pressure Transducer
 Body Type

Electrical Connection

Fittings

GF

 D - Dead End

B - Bendix Connector

CS -Surface Mount


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Accurate, miniature displays for point-of-use pressure monitoring.