Vapor Delivery Modules are self-contained modules for the delivery of ultra-high purity water vapor. They bring improved accuracy, higher flow rates, a wide control range and lower power consumption compared to flash evaporation systems.
KEY Applications
- Silicon semiconductor post-metal etch process
- Silicon semiconductor metal strip process
- Ultra-high purity humidification in sub-atmospheric environments
Discover how our vapor delivery modules can unlock the potential of your processes.