GP200 Series
Pressure-based Mass Flow Controllers


All of the performance.

None of the limitations.


A New Differential Pressure Sensor Based MFC for Advanced Semiconductor Processing


Learn how use of a differential pressure sensor instead of discrete pressure sensors combined with locating the control valve downstream of the laminar flow element in the new GP200 Series P-MFC delivers obvious advantages in flow measurement accuracy and repeatability over traditional P-MFCs.


What makes GP200 Series unique vs conventional P-MFCs?

See how the unique design approach of GP200 Series extends the use of P-MFCs to CVD processes.

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Review GP200 Series technical specifications


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