How Does GP200 Series Work?

Watch Video


A New Differential Pressure Sensor Based MFC for Advanced Semiconductor Processing


Learn how use of a differential pressure sensor instead of discrete pressure sensors combined with locating the control valve downstream of the laminar flow element in the new GP200 Series P-MFC delivers obvious advantages in flow measurement accuracy and repeatability over traditional P-MFCs.


What makes GP200 Series unique vs conventional P-MFCs?

See how the unique design approach of GP200 Series extends the use of P-MFCs to CVD processes.

Get the Data Sheet

Review GP200 Series technical specifications

Download Now

Get Updates

Get important updates on GP200 Series. We’ll send you specifications backed by data to help you improve the performance of your process.
Email Signup ›