Highest-purity flow path for challenging high-temperature applications.
Many of today’s advanced electronic device fabrication processes require extremely accurate and highly repeatable measurement and control of expensive ultra-pure gases and liquid precursors. Brooks Instrument meets those needs with our high temperature flow meters and controllers. Precise chemistry control is achieved through the combination of ultra-stable, highly accurate measurement sensors, fast precision control valves and powerful digital electronics. Purity of the process chemistry is ensured by our high-integrity (leak tight), ultra-high purity, all-metal wetted flow path, designed to keep outside contaminants like moisture and oxygen from corrupting the process media.
Key Applications
- Optical fiber manufacturing for high temperature flow meters - MCVD
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Silicon semiconductor device fabrication processes
- CVD (precursor delivery in vapor form)
- Strip (water vapor)
- Etch (water vapor for passivation)