GF120xHT Series Metal Sealed High-Temperature Thermal Mass Flow Controllers & Meters

GF120xHT high-temperature mass flow controllers (MFCs) and meters are designed to control and measure the mass flow rate of vapor from liquid or solid sources to support the growing usage of these precursors in semiconductor manufacturing processes. The flow module on GF120xHT can withstand operating environments of up to 150°C. To support this temperature range, the electronics are remotely connected to the rest of the device and mounted in a lower temperature location (max 50°C). The remote electronics can be DIN mounted with a choice of three different interconnecting cable lengths - 3 ft, 8 ft, and 16.5 ft standard. The wide range of communication protocols and fitting options make GF120xHT an ideal choice for next generation process equipment and upgrade for legacy heated MFCs.