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Brooks Instrument Legacy Products

Mass Flow Controllers

Brooks 5850S Mass Flow Controller

5800S Series

Elastomer Sealed Thermal Mass Flow Controllers

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Brooks Control Valve 5835

Models 5835, 5836, 5837, 5838

Brooks Model 5816-Ex

Models 5816-EX, 5864-EX

Ex-Proof Mass Flow Controllers

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Brooks Instrument 9861 MFC

9861

High Temperature Mass Flow Controllers

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Brooks SLA5850 RevA mass flow meter

SLA5800 Series Revision A

Elastomer Sealed Thermal Mass Flow Controllers

Download Installation Manual
Download Data Sheet

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Brooks MF Smart Series

MF Smart Series

Elastomer Sealed Thermal Mass Flow Controllers

Download Installation Manual

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Brooks Instrument GF135 mass flow controller

GF135

Metal Sealed Thermal Mass Flow Controllers

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Variable Area Flow Meters (Rotameters)

1198 Series

Sight Flow Indicator

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Brooks 2001 variable area flow meter

2001 Series

Acrylic Tube Variable Area Flow Meters

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Brooks Full-View Glass Tube Flow Meter

Full-View® 1100 Series

Brooks Instrument GT1000

GT1000 Series

Brooks MT3602 variable area flow meter

MT3600 Series

Brooks MT3809E variable area flow meter

MT3809E Series

Brooks 1350E flow meter with valve

Sho-Rate Series 1350E/1355E

Pressure & Vacuum Products

Brooks 5866 metal sealed pressure controller

Model 5866M

Brooks 8606, 8607 pressure regulator

Models 8606, 8607

Mechanical Pressure Regulators

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Brooks GCS404 cylinder scale

GCS400 Series

Brooks seal-free pressure transmitter

Models SFP32, SFP33

Seal-Free Pressure Transmitters

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Vaporization Products

Brooks direct liquid injection vaporizer plate system

Direct Liquid Injection (DLI) Vaporizers

Secondary Electronics & Software

Models 0151E and 0151i Flow Computers

Models 0151E, 0151i

Brooks VR100 Single Channel Power Supply & Display Module

Model VR100

Power Supply and Display

Download Data Sheet